{"id":385,"date":"2026-10-02T20:47:07","date_gmt":"2026-10-02T12:47:07","guid":{"rendered":"https:\/\/www.asuka002.com\/?p=385"},"modified":"2026-10-03T11:54:31","modified_gmt":"2026-10-03T03:54:31","slug":"jia-2018-ka-band-power-amplifier","status":"publish","type":"post","link":"https:\/\/www.asuka002.com\/index.php\/2026\/10\/02\/jia-2018-ka-band-power-amplifier\/","title":{"rendered":"Haikun Jia \uff1a\u78c1\u8026\u5408\u8c10\u632f\u5668\u4e0e\u5168 Ka \u6ce2\u6bb5\u529f\u653e"},"content":{"rendered":"\n

\u8fd9\u6b3e 65 nm CMOS \u529f\u653e\u7528\u78c1\u8026\u5408\u8c10\u632f\u5668\uff08magnetically coupled resonator\uff0cMCR\uff09\u5b8c\u6210\u8f93\u5165\u3001\u7ea7\u95f4\u548c\u8f93\u51fa\u5339\u914d\u3002\u4e24\u4e2a\u8026\u5408\u6a21\u6001\u5171\u540c\u8986\u76d6\u5bbd\u9891\u5e26\uff0c\u96be\u70b9\u5728\u4e8e\u538b\u4f4e\u5cf0\u95f4\u51f9\u9677\uff0c\u540c\u65f6\u5b8c\u6210\u963b\u6297\u53d8\u6362\u3002\u6587\u4e2d\u63d2\u56fe\u5747\u5f15\u81ea Jia \u7b49\uff082018\uff09<\/a>\uff0c\u56fe\u53f7\u6cbf\u7528\u539f\u6587\u3002<\/p>\n

\u5b9e\u6d4b\u6027\u80fd<\/h2>\n

\u7535\u8def\u91c7\u7528\u4e24\u7ea7\u5dee\u5206\u7ed3\u6784\uff0c\u7535\u6e90\u7535\u538b\u4e3a 1 V\u3002<\/p>\n\n\n\n\n\n\n\n\n\n\n
\u6307\u6807<\/th>\n\u5b9e\u6d4b\u7ed3\u679c<\/th>\n<\/tr>\n<\/thead>\n
\u5c0f\u4fe1\u53f7\u589e\u76ca\u5e26\u5bbd<\/td>\n21.6\u201341.6 GHz\uff0c\\(S_{21}>19\\) dB\uff1b\u5206\u6570\u5e26\u5bbd 63.3%\uff0c\u8986\u76d6 26.5\u201340 GHz Ka \u6ce2\u6bb5<\/td>\n<\/tr>\n
32 GHz \u5c0f\u4fe1\u53f7\u589e\u76ca<\/td>\n20.8 dB\uff1b\u5e26\u5185\u8d77\u4f0f\u7ea6 3.8 dB<\/td>\n<\/tr>\n
\u9971\u548c\u8f93\u51fa\u529f\u7387 \\(P_{\\mathrm{sat}}\\)<\/td>\n15.3 dBm\uff0832 GHz\uff0c\u7ea6 33.9 mW\uff09<\/td>\n<\/tr>\n
1 dB \u538b\u7f29\u70b9 \\(P_{1\\mathrm{dB}}\\)<\/td>\n12.9 dBm\uff0832 GHz\uff09<\/td>\n<\/tr>\n
\u5cf0\u503c\u529f\u7387\u9644\u52a0\u6548\u7387 PAE<\/td>\n32.9%\uff0832 GHz\uff09<\/td>\n<\/tr>\n
\u8f93\u51fa\u4e09\u9636\u622a\u70b9 OIP3<\/td>\n17.7 dBm\uff0832 GHz\uff09<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n

\u8f93\u51fa\u5339\u914d\u7f51\u7edc\u7684\u4eff\u771f\u6548\u7387<\/strong>\u5728\u5168 Ka \u6ce2\u6bb5\u9ad8\u4e8e 80%\uff0c\u5cf0\u503c\u4e3a 82.3%\uff08\u56fe 18\uff09\uff1b\u5b83\u4e0e\u5305\u542b\u6676\u4f53\u7ba1\u76f4\u6d41\u529f\u8017\u7684\u6574\u673a\u5b9e\u6d4b PAE \u662f\u4e0d\u540c\u6307\u6807\u3002<\/p>\n

1. \u53cc\u6a21\u6001\u4e3a\u4ec0\u4e48\u80fd\u6269\u5e26<\/h2>\n

\u6beb\u7c73\u6ce2 CMOS \u529f\u653e\u7684\u5bc4\u751f\u7535\u5bb9\u548c\u7247\u4e0a\u65e0\u6e90\u635f\u8017\u4f7f\u5355\u8c10\u632f\u7f51\u7edc\u96be\u4ee5\u517c\u987e\u5e26\u5bbd\u4e0e\u589e\u76ca\u3002\u964d\u4f4e\u52a0\u8f7d \\(Q\\) \u867d\u80fd\u6269\u5e26\uff0c\u4e5f\u4f1a\u538b\u4f4e\u4f20\u8f93\u5cf0\u503c\u3002MCR \u5c06\u4e24\u4e2a\u8c10\u632f\u56de\u8def\u901a\u8fc7\u53d8\u538b\u5668\u8026\u5408\uff0c\u4f7f\u4f20\u8f93\u54cd\u5e94\u51fa\u73b0\u4e24\u4e2a\u53ef\u8c03\u5cf0\u503c\u3002<\/p>\n

\n\"\u4e24\u4e2a\u901a\u8fc7\u4e92\u611f\u8026\u5408\u7684\u5e76\u8054
\u56fe 2\uff5c\u4e24\u4e2a\u5e76\u8054 RLC \u56de\u8def\u901a\u8fc7\u4e92\u611f\u8026\u5408\u3002<\/em><\/figcaption><\/figure>\n

\u8bbe\u7535\u611f\u4e3a \\(L_1,L_2\\)\uff0c\u4e92\u611f\u4e3a \\(M\\)\uff0c\u8026\u5408\u7cfb\u6570\u4e3a \\(k\\)\uff1a<\/p>\n

\\[M=k\\sqrt{L_1L_2},\\qquad
\n\\omega_i=\\frac{1}{\\sqrt{L_iC_i}},\\qquad
\nQ_i=\\frac{R_{Pi}}{\\omega_i L_i}=\\omega_i R_{Pi}C_i.\\]<\/div>\n

\\(R_{Pi}\\) \u4e3a\u7b2c \\(i\\) \u4e2a\u672a\u8026\u5408\u56de\u8def\u5728\u8c10\u632f\u5904\u7684\u5e76\u8054\u7b49\u6548\u7535\u963b\u3002\u8bba\u6587\u628a \\(\\omega_1=\\omega_2\\)\u3001\\(Q_1=Q_2\\) \u79f0\u4e3a\u5bf9\u79f0 MCR\uff1b\u4e24\u7aef\u7684 \\(R_{Pi}\\) \u53ef\u4ee5\u4e0d\u540c\u3002<\/p>\n

\u4ee4\u8de8\u963b \\(Z_{21}=V_{\\mathrm{out}}\/I_{\\mathrm{in}}\\)\u3002\u8f93\u5165\u7535\u6d41\u4e0e\u8f93\u51fa\u8d1f\u8f7d\u4e00\u5b9a\u65f6\uff0c\u8f93\u51fa\u529f\u7387\u968f \\(|Z_{21}|^2\\) \u589e\u5927\uff0c\u56e0\u6b64\u9700\u8981\u8ba9 \\(|Z_{21}|\\) \u5728\u76ee\u6807\u9891\u6bb5\u5c3d\u91cf\u5e73\u5766\u3002\u6700\u7ec8\u8fd8\u8981\u7528\u5927\u4fe1\u53f7\u8d1f\u8f7d\u7275\u5f15\u68c0\u67e5\u6676\u4f53\u7ba1\u7684\u5de5\u4f5c\u70b9\u3002<\/p>\n

2. \u5bf9\u79f0 MCR\uff1a\u53cc\u5cf0\u4e0e\u5e73\u5766\u6761\u4ef6<\/h2>\n

\u5bf9\u79f0\u60c5\u51b5\u4e0b\uff0c\\(\\omega_1=\\omega_2=\\omega_0\\)\u3001\\(Q_1=Q_2=Q\\)\u3002\u4ee4 \\(x=\\omega\/\\omega_0\\)\u3001\\(d=1-k^2\\)\u3001\\(R_m=\\sqrt{R_{P1}R_{P2}}\\)\uff0c\u53ef\u5199\u51fa<\/p>\n

\\[Z_{21}(j\\omega)=\\frac{jkQxR_m}{A(x)+jB(x)},\\]<\/div>\n
\\[A(x)=Q^2(dx^4-2x^2+1)-dx^2,\\qquad
\nB(x)=2Qx(1-dx^2).\\]<\/div>\n

\u5728 \\(2Q^2\\gg d\\) \u65f6\uff0c\u7531 \\(A(x)=0\\) \u4f30\u7b97\u4e24\u4e2a\u5cf0\u7684\u4f4d\u7f6e\uff1a<\/p>\n

\\[\\omega_L\\approx\\frac{\\omega_0}{\\sqrt{1+k}},\\qquad
\n\\omega_H\\approx\\frac{\\omega_0}{\\sqrt{1-k}}.\\]<\/div>\n

\\(k\\) \u8d8a\u5927\uff0c\u4e24\u5cf0\u8d8a\u8fdc\uff1b\u8fc7\u5f31\u5219\u5e26\u5bbd\u4e0d\u8db3\uff0c\u8fc7\u5f3a\u5219\u5cf0\u95f4\u51f9\u9677\u52a0\u6df1\u3002<\/p>\n

\n\"\u4e0d\u540c\u8026\u5408\u7cfb\u6570\u4e0b\u7684\u8de8\u963b\u9891\u7387\u54cd\u5e94\"
\u56fe 3\uff5c\u8026\u5408\u7cfb\u6570\u6539\u53d8\u53cc\u5cf0\u95f4\u8ddd\u548c\u5cf0\u95f4\u51f9\u9677\u3002<\/em><\/figcaption><\/figure>\n

\u8bba\u6587\u5728\u4e24\u5cf0\u4e4b\u95f4\u53d6 \\(Z_{21}\\) \u76f8\u4f4d\u4e3a \\(-90^\\circ\\) \u7684\u9891\u7387 \\(\\omega_X\\)\uff0c\u4f30\u7b97\u4e2d\u95f4\u5e45\u5ea6\uff1a<\/p>\n

\\[\\omega_X=\\frac{\\omega_0}{\\sqrt{1-k^2}},\\qquad
\n|Z_{21}(j\\omega_X)|=
\n\\frac{kQ\\sqrt{1-k^2}}{1-k^2+k^2Q^2}\\sqrt{R_{P1}R_{P2}}.\\]<\/div>\n

\\(\\omega_X\\) \u662f\u76f8\u4f4d\u70b9\uff1b\u53ea\u6709\u53cc\u6a21\u6001\u5206\u79bb\u6e05\u695a\u65f6\uff0c\u5b83\u624d\u63a5\u8fd1\u5e45\u5ea6\u8c37\u5e95\u3002\u4ee5\u4e24\u5cf0\u5e45\u5ea6\u7ea6 \\(\\sqrt{R_{P1}R_{P2}}\/2\\) \u4f5c\u6bd4\u8f83\uff0c\u5cf0\u8c37\u6bd4\u8fd1\u4f3c\u4e3a<\/p>\n

\\[\\mathcal R\\approx\\frac{1-k^2+k^2Q^2}{2kQ\\sqrt{1-k^2}}.\\]<\/div>\n

\u4ee4 \\(\\mathcal R=1\\)\uff0c\u5f97\u5230\u5e73\u5766\u6761\u4ef6<\/p>\n

\\[k^2(1+Q^2)=1,
\n\\qquad\\text{\u5373}\\qquad
\nk=\\frac{1}{\\sqrt{1+Q^2}}.\\]<\/div>\n

\u5e38\u7528\u7684 \\(kQ=1\\) \u53ea\u662f\u9ad8 \\(Q\\) \u8fd1\u4f3c\u3002\u8bba\u6587\u5728 \\(Q=1.5\\) \u65f6\u7b97\u5f97\u5b83\u4ecd\u6709\u7ea6 0.5 dB \u8d77\u4f0f\u3002\u4e0a\u8ff0\u6761\u4ef6\u53ef\u4f5c\u7535\u8def\u521d\u503c\uff0c\u5b9e\u9645\u5e73\u5766\u5ea6\u8fd8\u53d6\u51b3\u4e8e\u53d8\u538b\u5668\u635f\u8017\u548c\u5bc4\u751f\u53c2\u6570\u3002<\/p>\n

3. \u4e0d\u5bf9\u79f0 MCR\uff1a\u7528 \\(Q\\) \u8865\u507f\u9519\u9891<\/h2>\n

\u8f93\u51fa\u7f51\u7edc\u4e24\u7aef\u7535\u963b\u8f83\u4f4e\uff0c\u8f83\u5bb9\u6613\u63a5\u8fd1\u4f4e \\(Q\\) \u5bf9\u79f0\u6a21\u578b\uff1b\u8f93\u5165\u4e0e\u7ea7\u95f4\u7f51\u7edc\u53d7\u5230 MOS \u6805\u7535\u963b\u3001\u6805\u7535\u5bb9\u548c\u53d8\u538b\u5668\u635f\u8017\u5f71\u54cd\uff0c\u4e24\u7aef\u7684\u8c10\u632f\u9891\u7387\u4e0e \\(Q\\) \u5f80\u5f80\u4e0d\u540c\u3002<\/p>\n

\u53ea\u9519\u5f00\u4e24\u7aef\u7684\u672a\u8026\u5408\u8c10\u632f\u9891\u7387\uff0c\u53cc\u5cf0\u901a\u5e38\u4f1a\u4e00\u9ad8\u4e00\u4f4e\u3002\u8bba\u6587\u56fe 7\u201310 \u8868\u660e\uff0c\u9002\u5f53\u8c03\u6574 \\(Q\\) \u53ef\u4ee5\u8865\u507f\u8fd9\u79cd\u4e0d\u5bf9\u79f0\u3002\u5b9a\u4e49<\/p>\n

\\[r_\\omega=\\frac{\\omega_1}{\\omega_2},\\qquad
\nr_Q=\\frac{Q_1}{Q_2},\\]<\/div>\n

\u5f53 \\(r_\\omega=r_Q\\)\uff0c\u5373 \\(\\omega_1\/Q_1=\\omega_2\/Q_2\\) \u65f6\uff0c\u53cc\u5cf0\u53ef\u91cd\u65b0\u63a5\u8fd1\u7b49\u9ad8\u3002\u9519\u9891\u6709\u52a9\u4e8e\u6269\u5e26\uff0c\u4f46\u4e5f\u53ef\u80fd\u964d\u4f4e\u5cf0\u503c\u8de8\u963b\uff1b\u5141\u8bb8\u9519\u5f00\u591a\u5c11\uff0c\u53d6\u51b3\u4e8e\u589e\u76ca\u8d77\u4f0f\u8981\u6c42\u3002<\/p>\n

\u4ee4 \\(r_\\omega=r_Q=\\alpha\\)\uff0c\u7b49\u5cf0\u65f6\u7684\u8de8\u963b\u5cf0\u503c\u8fd1\u4f3c\u4e3a<\/p>\n

\\[|Z_{21}(j\\omega_{H,L})|\\approx
\n\\frac{k\\alpha\\sqrt{R_{P1}R_{P2}}}
\n{\\sqrt{(\\alpha^2-1)^2+4k^2\\alpha^2}}.\\]<\/div>\n

\\(\\alpha=1\\) \u65f6\uff0c\u5cf0\u503c\u4e3a \\(\\sqrt{R_{P1}R_{P2}}\/2\\)\uff1b\u9519\u9891\u4f1a\u5e26\u6765\u5cf0\u503c\u635f\u5931\u3002\u82af\u7247\u7684\u7ea7\u95f4\u7f51\u7edc\u91c7\u7528\u9519\u9891\u8bbe\u8ba1\uff0c\u6548\u679c\u89c1\u56fe 20\u3002\u9519\u9891\u65b9\u5411\u53d6\u51b3\u4e8e\u7aef\u53e3\u963b\u6297\u548c\u635f\u8017\uff0c\u4e0d\u80fd\u7167\u642c\u3002<\/p>\n

\n\"\u7ea7\u95f4\u7f51\u7edc\u4e24\u7aef\u9519\u9891\u65f6\u7684\u963b\u6297\u54cd\u5e94\"
\u56fe 20(a)\uff5c\u4e24\u7aef\u8c10\u632f\u9891\u7387\u9519\u5f00\u3002<\/em><\/figcaption><\/figure>\n
\n\"\u7ea7\u95f4\u7f51\u7edc\u4e24\u7aef\u540c\u9891\u65f6\u7684\u963b\u6297\u54cd\u5e94\"
\u56fe 20(b)\uff5c\u4e24\u7aef\u8c10\u632f\u9891\u7387\u5bf9\u9f50\uff1b\u6bd4\u8f83\u4e24\u56fe\u65f6\u9700\u4fdd\u6301\u52a0\u8f7d\u548c\u589e\u76ca\u8d77\u4f0f\u7ea6\u675f\u4e00\u81f4\u3002<\/em><\/figcaption><\/figure>\n

4. \u8f93\u51fa\u5339\u914d\uff1a\u7b97\u521d\u503c\uff0c\u518d\u505a\u7535\u78c1\u4f18\u5316<\/h2>\n

\u8f93\u51fa\u7ea7\u5148\u505a\u8d1f\u8f7d\u7275\u5f15\uff0c\u518d\u7531\u8f93\u51fa\u7f51\u7edc\u628a 50 \u03a9 \u8d1f\u8f7d\u53d8\u6362\u5230\u76ee\u6807\u6f0f\u7aef\u963b\u6297\u300232 GHz \u65f6\uff0c\u6700\u4f18\u8d1f\u8f7d\u963b\u6297\u7684\u5171\u8f6d<\/strong>\u53ef\u7b49\u6548\u4e3a \\(R_S=37.5\\,\\Omega\\) \u4e0e \\(C_S=123\\,\\mathrm{fF}\\) \u5e76\u8054\u3002\u52a0\u4e0a\u9884\u4f30\u7684\u521d\u7ea7\u7ed5\u7ec4\u5bc4\u751f\u7535\u5bb9 15 fF\uff0c\u5f97\u5230 \\(C_1=138\\,\\mathrm{fF}\\)\uff1b\u710a\u76d8\u5bc4\u751f\u7535\u5bb9\u53d6 25 fF\u3002<\/p>\n

\n\"\u8f93\u51fa\u5339\u914d\u7f51\u7edc\u53ca\u5176\u7b80\u5316\u53c2\u6570\"
\u56fe 12\uff5c\u5b9e\u9645\u8f93\u51fa\u7f51\u7edc\u53ca\u8ba1\u7b97\u521d\u503c\u7528\u7684\u7b80\u5316\u6a21\u578b\u3002<\/em><\/figcaption><\/figure>\n

\u4ee5\u4e24\u4e2a\u6a21\u6001\u9891\u7387\u7684\u51e0\u4f55\u5e73\u5747\u4f5c\u4e3a\u4e2d\u5fc3\u9891\u7387\uff1a<\/p>\n

\\[\\omega_c=\\sqrt{\\omega_H\\omega_L}\\approx\\frac{\\omega_0}{(1-k^2)^{1\/4}}.\\]<\/div>\n

\u4ee4 \\(a=\\omega_c R_SC_1\\)\u3002\u5bf9\u79f0 MCR \u7684\u5e73\u5766\u6761\u4ef6\u7ed9\u51fa<\/p>\n

\\[Q=\\sqrt{\\frac{-1+\\sqrt{1+4a^4}}{2}},\\qquad
\nk=\\frac{1}{\\sqrt{1+Q^2}}.\\]<\/div>\n

\u4ee3\u5165 \\(\\omega_c=2\\pi\\cdot32\\,\\mathrm{GHz}\\)\uff0c\u5f97 \\(Q\\approx0.83\\)\u3001\\(k\\approx0.77\\)\u3002\u518d\u4ee4\u4e24\u7aef\u7684 \\(Q\\) \u4e0e\u672a\u8026\u5408\u8c10\u632f\u9891\u7387\u76f8\u7b49\uff1a<\/p>\n

\\[L_1=\\frac{R_S^2C_1}{Q^2},\\qquad
\nL_2=\\frac{R_L}{R_S}L_1,\\qquad
\nC_2=\\frac{R_S}{R_L}C_1.\\]<\/div>\n\n\n\n\n\n\n\n\n
\u7b80\u5316\u6a21\u578b\u53c2\u6570<\/th>\n\u521d\u503c<\/th>\n<\/tr>\n<\/thead>\n
\\(L_1\\)<\/td>\n\u7ea6 282 pH<\/td>\n<\/tr>\n
\\(L_2\\)<\/td>\n\u7ea6 376 pH<\/td>\n<\/tr>\n
\\(C_2\\)<\/td>\n\u7ea6 104 fF<\/td>\n<\/tr>\n
\u6b21\u7ea7\u53e6\u52a0\u7535\u5bb9 \\(C_2-C_{\\mathrm{pad}}\\)<\/td>\n\u7ea6 79 fF<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n

\u8fd9\u4e9b\u6570\u503c\u53ea\u7528\u4e8e\u8d77\u6b65\u3002\u52a0\u5165\u771f\u5b9e\u53d8\u538b\u5668\u548c\u5bc4\u751f\u53c2\u6570\u540e\uff0c\u521d\u7248\u589e\u76ca\u4ecd\u6709\u7ea6 0.5 dB \u8d77\u4f0f\uff0c\u9700\u8981\u7ee7\u7eed\u505a\u7248\u56fe\u4e0e\u7535\u78c1\u4f18\u5316\u3002\u6700\u7ec8\u8f93\u51fa\u5339\u914d\u7f51\u7edc\u7684\u4eff\u771f\u6548\u7387<\/strong>\u5cf0\u503c\u4e3a 82.3%\uff0c\u5168 Ka \u6ce2\u6bb5\u9ad8\u4e8e 80%\u3002<\/p>\n

\n\"\u8f93\u51fa\u5339\u914d\u7f51\u7edc\u7684\u6a21\u62df\u963b\u6297\u4e0e\u6548\u7387\"
\u56fe 18\uff5c\u53f3\u4fa7\u662f\u65e0\u6e90\u8f93\u51fa\u7f51\u7edc\u7684\u4eff\u771f\u6548\u7387\uff0c\u5e76\u975e\u6574\u673a PAE\u3002<\/em><\/figcaption><\/figure>\n

5. \u7ea7\u95f4\u5339\u914d\u4e0e\u7535\u8def\u5b9e\u73b0<\/h2>\n
\n\"\u524d\u7ea7\u8f93\u51fa\u81f3\u540e\u7ea7\u6805\u7aef\u7684\u8026\u5408\u5339\u914d\u7f51\u7edc\"
\u56fe 13\uff5c\u7ea7\u95f4\u53d8\u538b\u5668\u540c\u65f6\u5b8c\u6210\u963b\u6297\u53d8\u6362\u548c\u53cc\u6a21\u6001\u8c03\u8282\u3002<\/em><\/figcaption><\/figure>\n

\u540e\u7ea7 MOS \u6805\u7aef\u53ef\u8fd1\u4f3c\u6210\u4e32\u8054\u7535\u963b\u4e0e\u7535\u5bb9\uff1a<\/p>\n

\\[Z_g=R_g+\\frac{1}{j\\omega C_g}.\\]<\/div>\n

\u5728\u6307\u5b9a\u9891\u7387\u6362\u7b97\u4e3a\u5e76\u8054\u5f62\u5f0f\uff0c\u5f97\u5230<\/p>\n

\\[R_{p,g}=R_g+\\frac{1}{\\omega^2C_g^2R_g},\\qquad
\nC_{p,g}=\\frac{C_g}{1+(\\omega R_gC_g)^2}.\\]<\/div>\n

\u7b49\u6548\u8d1f\u8f7d\u968f\u9891\u7387\u53d8\u5316\uff0c\u56e0\u6b64\u4e0d\u80fd\u53ea\u5728\u4e2d\u5fc3\u9891\u7387\u68c0\u67e5\u7ea7\u95f4\u5339\u914d\u3002\u8bba\u6587\u6bd4\u8f83\u4e86\u4e0d\u5bf9\u79f0 MCR \u548c\u7ed9\u7ea7\u95f4\u56de\u8def\u52a0\u7535\u963b\u4e24\u79cd\u6269\u5e26\u65b9\u6cd5\uff1b\u5728\u76f8\u540c\u589e\u76ca\u8d77\u4f0f\u7ea6\u675f\u4e0b\uff0c\u8bba\u6587\u5efa\u8bae\u540e\u7eed\u8bbe\u8ba1\u8003\u8651\u52a0\u7535\u963b\u3002\u5b9e\u9645\u82af\u7247\u91c7\u7528\u4e0d\u5bf9\u79f0 MCR\uff0c\u901a\u8fc7\u4e24\u7aef\u9519\u9891\u6269\u5c55\u54cd\u5e94\uff1b\u5176\u5cf0\u503c\u3001\u51f9\u9677\u548c\u635f\u8017\u8fd8\u9700\u7528\u7535\u78c1\u63d0\u53d6\u7ed3\u679c\u4fee\u6b63\u3002<\/p>\n

\u7535\u8def\u4e3a\u4e24\u7ea7\u5dee\u5206\u5171\u6e90\u7ed3\u6784\uff0c\u8f93\u5165\u3001\u7ea7\u95f4\u3001\u8f93\u51fa\u5404\u7528\u4e00\u4e2a\u53d8\u538b\u5668\u3002\u9a71\u52a8\u7ea7\u548c\u8f93\u51fa\u7ea7\u7684\u6676\u4f53\u7ba1\u603b\u5bbd\u5ea6\u5206\u522b\u4e3a \\(64\\,\\mu\\mathrm{m}\\)\u3001\\(128\\,\\mu\\mathrm{m}\\)\uff0c\u6805\u957f\u5747\u4e3a 60 nm\uff1b\u4ea4\u53c9\u4e2d\u548c\u7535\u5bb9\u5206\u522b\u4e3a 23 fF\u300145 fF\uff0c\u7528\u6765\u51cf\u5f31\u6805\u6f0f\u53cd\u9988\uff0c\u6539\u5584\u589e\u76ca\u3001\u9694\u79bb\u548c\u7a33\u5b9a\u6027\u3002<\/p>\n

\n\"\u4e24\u7ea7\u5dee\u5206
\u56fe 14\uff5c\u4e24\u7ea7\u5dee\u5206\u529f\u653e\u53ca\u4e09\u4e2a\u53d8\u538b\u5668\u5339\u914d\u7f51\u7edc\u3002<\/em><\/figcaption><\/figure>\n

\u8f93\u51fa\u53d8\u538b\u5668\u53e6\u52a0\u4e32\u8054\u6f0f\u611f \\(L_{\\mathrm{add}}\\)\u3002\u5728\u7b80\u5316\u4e92\u611f\u6a21\u578b\u4e2d\uff0c<\/p>\n

\\[L’_p=L_p,\\qquad L’_s=L_s+L_{\\mathrm{add}},\\qquad
\nk’=k\\sqrt{\\frac{L_s}{L_s+L_{\\mathrm{add}}}}.\\]<\/div>\n

\u5b83\u5728\u4e0d\u6539\u521d\u7ea7\u7535\u611f\u7684\u540c\u65f6\u8c03\u6574\u6b21\u7ea7\u7535\u611f\u548c\u6709\u6548\u8026\u5408\u7cfb\u6570\u3002\u8bba\u6587\u9009\u7528\u7ea6 156 pH \u7684\u9644\u52a0\u7535\u611f\uff0c\u62a5\u544a\u5176 32 GHz \u4e0b\u7684 \\(Q\\) \u7ea6\u4e3a 27\uff08\u56fe 16\uff09\u3002<\/p>\n

6. \u5b9e\u6d4b\u66f2\u7ebf\u8bf4\u660e\u4e86\u4ec0\u4e48<\/h2>\n
\n\"\u529f\u7387\u653e\u5927\u5668\u7684\u5b9e\u6d4b\u4e0e\u4eff\u771f\u6563\u5c04\u53c2\u6570\"
\u56fe 23\uff5c\u5b9e\u7ebf\u4e3a\u5b9e\u6d4b\uff0c\u70b9\u7ebf\u4e3a\u4eff\u771f\uff1b\u5e26\u5185 \\(S_{21}\\) \u8d77\u4f0f\u6709\u660e\u663e\u5dee\u5f02\u3002<\/em><\/figcaption><\/figure>\n
\n\"24\u300132\u300140
\u56fe 24\uff5c24\u300132\u300140 GHz \u7684\u5927\u4fe1\u53f7\u626b\u63cf\u3002<\/em><\/figcaption><\/figure>\n
\n\"\u9971\u548c\u8f93\u51fa\u529f\u7387\u968f\u9891\u7387\u53d8\u5316\"
\u56fe 25\uff5c\u9971\u548c\u8f93\u51fa\u529f\u7387\u5728\u4e2d\u95f4\u9891\u6bb5\u8f83\u5e73\u5766\uff0c\u9891\u5e26\u8fb9\u7f18\u4e0b\u964d\u3002<\/em><\/figcaption><\/figure>\n